제품 사양
| Tube O.D | Item | Gas | Total Water Capacity (liter) | Working Pressure (bar) | Gas Capacity (air/m³) |
| 24" | Y-TON 360L | SiH4,PH3,NH3,SF6,NF3,N2O | 360 | 166 | 59 |
| Y-TON 434L | 434 | 71 | |||
| Y-TON 440L | 440 | 73 | |||
| Y-TON 470L | 470 | 78 | |||
| 22" | Y-TON 340L | SiH4,PH3,NH3,SF6,NF3,N2O | 340 | 200 | 66 |
| Y-TON 360L | 360 | 70 | |||
| Y-TON 380L | 380 | 74 |
